Silicon Carbide / precision ceramic

Silicon Carbide Ceramic Plates

Silicon carbide plates serve as kiln furniture, burner plates and wear liners above 1200 C. Flatness held to 0.005 mm per 100 mm.

Typical Uses

Vacuum chuck faces, insulating plates, wear plates, sensor substrates.

Parameters to Discuss

Flatness, thickness, surface finish, feature location.

Silicon Carbide Ceramic Plates are flat parts used as wear plates, insulating barriers, substrate blanks, heat spreaders and precision reference surfaces.

Silicon carbide plates serve as kiln furniture, burner plates and wear liners above 1200°C. The combination of high conductivity and low expansion lets a plate take direct flame on one face without warping or cracking.

Silicon carbide is chosen when a part must survive abrasion, high temperature and thermal shock at the same time. Hardness reaches 2200-2500 HV, thermal conductivity of 120-200 W/m·K is several times that of steel, and expansion of 4.0 ×10⁻⁶/K keeps it in shape through fast temperature swings.

It is brittle and electrically semiconducting, so it is not used where electrical isolation matters, and its hardness makes diamond grinding the only practical finishing route.

Specifications

Maximum sizeup to 400×400 mm
Thickness0.3-30 mm
Flatness0.005 mm per 100 mm
Parallelism0.01 mm
Surface finishRa 0.4 µm ground, Ra 0.2 µm lapped
Holes and slotsground, drilled or laser cut
Edgessquare, chamfered or radiused

Silicon Carbide Properties

CompositionSintered silicon carbide (SSiC)
Density3.10-3.15 g/cm³
Vickers hardness2200-2500 HV
Flexural strength400-500 MPa
Fracture toughness3-4 MPa·m½
Max. service temperature1400°C in air (1600°C inert)
Thermal conductivity120-200 W/m·K
Thermal expansion (20-1000°C)4.0 ×10⁻⁶/K

Machining and Tolerances

Plates are pressed or tape cast, fired, then surface ground and lapped. Thin large plates are the most likely to warp, so material is removed in equal amounts from both faces to keep the stress balanced, and grinding is followed by a relaxation step before the final passes.

Where It Is Used

  • Wear plates and chute liners in bulk handling
  • Electrical insulation barriers in switchgear and heaters
  • Hot platens and press tooling in electronics manufacturing
  • Vacuum chuck and metering surfaces in semiconductor equipment
  • Precision reference and gauge blocks in metrology

Frequently Asked Questions

How flat can a large ceramic plate be held?

0.005 mm per 100 mm is the working standard for lapped plates. Larger areas are harder, and above 300×300 mm we generally specify flatness over a defined area rather than across the whole plate.

Will it warp when I bolt it down?

It can. A plate that is flat when unclamped will follow a distorted mounting face, so we recommend a relieved or lapped mounting surface, evenly torqued fixings and a compliant interlayer.

Key Design Factors

Flatness and parallelism

Surface finish for sealing or optics

Feature location tolerance

Thickness versus stiffness

Discuss this component

Send your drawing or requirements — we review geometry, material, and process feasibility before quoting.