Particle-free ceramic components for wafer transfer and handling in semiconductor tools.
A handling arm carries the wafer between stations, so it has to be stiff, light and dimensionally stable in vacuum and at process temperature. Flatness held to 0.01 mm, contact faces polished.
View component →Fingers are the elements that touch the wafer edge or underside. Flatness held to 0.01 mm, contact faces polished.
View component →The fork, or end effector, seats the wafer on the chuck. Flatness held to 0.01 mm, contact faces polished.
View component →
