Aluminium Nitride / precision ceramic

Aluminum Nitride Ceramic Plates

Aluminium nitride plates are heat spreaders. Flatness held to 0.005 mm per 100 mm.

Typical Uses

Vacuum chuck faces, insulating plates, wear plates, sensor substrates.

Parameters to Discuss

Flatness, thickness, surface finish, feature location.

Aluminum Nitride Ceramic Plates are flat parts used as wear plates, insulating barriers, substrate blanks, heat spreaders and precision reference surfaces.

Aluminium nitride plates are heat spreaders. They sit under power devices and heat sinks where the plate has to move heat away while staying electrically insulating, and they are the standard replacement for beryllium oxide in this role.

Aluminium nitride is the thermal-management ceramic. Conductivity of 170-200 W/m·K rivals metals while the material stays an electrical insulator, and its 4.5 ×10⁻⁶/K expansion sits close to silicon, which is why it underpins power electronics substrates.

It degrades in humid or alkaline conditions unless protected, its flexural strength of 300-350 MPa is only moderate, and it costs considerably more than alumina.

Specifications

Maximum sizeup to 400×400 mm
Thickness0.3-30 mm
Flatness0.005 mm per 100 mm
Parallelism0.01 mm
Surface finishRa 0.4 µm ground, Ra 0.2 µm lapped
Holes and slotsground, drilled or laser cut
Edgessquare, chamfered or radiused

Aluminium Nitride Properties

CompositionAluminium nitride
Density3.26 g/cm³
Vickers hardness1100-1200 HV
Flexural strength300-350 MPa
Fracture toughness2.5-3.5 MPa·m½
Max. service temperature1000°C
Thermal conductivity170-200 W/m·K
Thermal expansion (20-1000°C)4.5 ×10⁻⁶/K

Machining and Tolerances

Plates are pressed or tape cast, fired, then surface ground and lapped. Thin large plates are the most likely to warp, so material is removed in equal amounts from both faces to keep the stress balanced, and grinding is followed by a relaxation step before the final passes.

Where It Is Used

  • Wear plates and chute liners in bulk handling
  • Electrical insulation barriers in switchgear and heaters
  • Hot platens and press tooling in electronics manufacturing
  • Vacuum chuck and metering surfaces in semiconductor equipment
  • Precision reference and gauge blocks in metrology

Frequently Asked Questions

How flat can a large ceramic plate be held?

0.005 mm per 100 mm is the working standard for lapped plates. Larger areas are harder, and above 300×300 mm we generally specify flatness over a defined area rather than across the whole plate.

Will it warp when I bolt it down?

It can. A plate that is flat when unclamped will follow a distorted mounting face, so we recommend a relieved or lapped mounting surface, evenly torqued fixings and a compliant interlayer.

Key Design Factors

Flatness and parallelism

Surface finish for sealing or optics

Feature location tolerance

Thickness versus stiffness

Discuss this component

Send your drawing or requirements — we review geometry, material, and process feasibility before quoting.